Turbomolecular pump Pfeiffer Balzers TPU170

Remark: Electronic drive unit TCP300 defect

High vacuum pump

Pfeiffer Balzers Turbomolecular pump TPU170
 

• air or water cooled

• heating jacket

• ultimate pressure 1·10^-10 mbar

• Volume flow rate for N₂ 170l/s

Electronic drive unit TCP300

Measurement range (air, N2)    5×10-9 … 1000 mbar
Accuracy    ≈±30% in the range 1×10-8 … 100 mbar
Reproducibility  ≈±5% in the range 1×10-8 … 100 mbar

Connecting cables included

Manuals included

TPU170 under test