Turbomolecular Pump Test Bench
Induplan has the capability to test high vacuum equipment and gas control equipment. We sell second hand material tested.
The turbopump is water cooled with a Cartilex air to water converter.
Cold cathode gauge
Measurement range 5 x 10-3 to ~10-10 to 5 x 10-3 mbar .
Initial accuracy and reproducibility +5%.
The measurement are made with air. For other gas a correction factor shall be used.
Calibration of the cold cathode gauge.
range (air, O2, CO, N2)
8×10-4 … 1500 mbar
Repeatability with air ≈±2% of reading in the range of 1×10-2 … 100 hPa