High Vacuum Equipment
Used equipment coming from a private high vacuum laboratory
Turbomolecular Pumps with Control Unit
Turbomolecular Pump Test Bench
Varian 1000HT 1000l/s (with controller, tested)
Alcatel 5401 400l/s (with controller, tested)
Edwards ETP 100_200 200l/s (with controller, tested)
Pfeiffer Balzers TPU170 170l/s (with controller, tested)
Vacuum Measurement
Leybold-Hereaus Diavac-K large
manometric gauge 1 to 1000mbar
Pfeiffer Balzers FullRange Gauge PKR251
tested 5 x 10-9
to 1000mbar
Pfeiffer Balzers
total pression controller TPG251 for above tested
Balzers TPR017KF compact pirani gauge
tested
8 x 10-4
to 1000mbar
Balzers IKR0020 compact cold cathode
gauge
tested 10-10
to 5 x 10-3 mbar
Balzers TPG 300 Total Pressure
Controller for above
tested
Leybold Thermovac TM20 pirani gauge 5 x 10-3 to 1000mbar
Gas Control Equipment
Cleaning Plasma Chamber
Mass Flow controller
Automatic Vacuum Gas Regulating
Device
Valves
Automatic regulating valve RME 010 with control unit
Vacuum Accessories
KF bellows hoses
Sealed
Mechanical pusher
Other Equipment
Transparent dessicator (tested)
For more details
call induplan@vtxnet.ch